Major Scientific Instrument Development Specialization - Progress of Micro-Nanometers

[China Instrument Network Instrument R&D] A few days ago, a major national scientific instrument and equipment development project led by Shanghai Measurement & Engineering Equipment Supervision Co., Ltd., a wholly-owned subsidiary of Shanghai Institute of Metrology and Measurement Technology, “Development of cross-scale micro/nanometers The application (2014YQ090709) 2016 conference was held in this hospital. The meeting was chaired by Xie Zheng, Deputy Director of the Department of Science and Technology of the General Administration of Quality Supervision, Inspection and Quarantine, Deputy Director Wang Yuewei from the Department of Science and Technology of the State General Administration of Quality Supervision, and Director of the Ministry of Science and Technology, Director of the Coordination Department Qian Xiaoyong, Director of the Shanghai Science and Technology Commission Base, Hao Haomin, and Zhang Luxi. The supervisors, Lu Min Chief Engineer of Shanghai Bureau of Quality Supervision, Director Zhu Chenhui, Academician Jin Guojun, Academician Zhuang Songlin, Academician Li Tongbao, President of Shanghai Metrology and Measurement Technology Research Institute Shao Li and all members of the project team attended the meeting.

At the meeting, the deputy director of the text thanked the reporter for the results of the mid-term evaluation of the project of the country's major scientific instrument equipment development project in 2016. A total of 29 projects participated in the assessment. The mid-term evaluation of the project was classified as Class A and became one of the only five Type A projects. Leaders and experts attending the meeting congratulated the project on having obtained such a high rating!

Shao Li, the project leader, introduced the progress of the project to the participating leaders and experts, demonstrated the results of the project, and reported the next phase of the work plan and the series of prototypes. This project has developed a high-precision cross-scale micro-nanometer and a general-purpose cross-scale micro-nanometer two (in assembly), performance indicators and related parameters are in line with the requirements of the Ministry of Science and Technology. In addition, the R&D equipment of this project has been applied in the preparation and testing of nano-standard samples, micro-mesoscopic structure detection of ultra-precision processing materials, detection of IC wafers, and detection of environmental particulate matter.

Participating leaders, expert groups, supervision teams, and user committee members all expressed optimism about the development and application prospects of the project. It is suggested that the project follow-up engineering and industrialization work should be strengthened to further improve the stability and reliability of the instrument and focus on 1-2 Develops specialized application software in better areas.

Deputy Director Wang Yuewei proposed that we should pay attention to the issue of intellectual property rights and make high-end instruments made in China truly go to market by deepening the real needs of the key points and introducing professional marketing talent later.

(Original title: The 2016 National Conference on the Development and Application of Cross-scale Micro-nanometers for the Development of National Major Scientific Instruments and Equipment was held at the Municipal Laboratory of Measurement)